Novel Air Flow Meter for an Automobile Engine Using a Si Sensor with Porous Si Thermal Isolation
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منابع مشابه
Novel Air Flow Meter for an Automobile Engine Using a Si Sensor with Porous Si Thermal Isolation
An air flow meter for measuring the intake air of an automobile engine is presented. It is based on a miniaturized silicon thermal mass flow sensor using a thick porous Si (Po-Si) layer for local thermal isolation from the Si substrate, on which the sensor active elements are integrated. The sensor is mounted on one side of a printed circuit board (PCB), on the other side of which the readout a...
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ژورنال
عنوان ژورنال: Sensors
سال: 2012
ISSN: 1424-8220
DOI: 10.3390/s121114838